Parker Instrumentation

Bulk Gas Valves

Parker Hannifin's Veriflo Division is a leader in developing advanced bulk gas valves for semiconductor manufacturing. These valves are critical to controlling the flow of high-purity gases, ensuring precise delivery and reliable shut-off in ultra-clean environments. The semiconductor industry relies on bulk gas valves to meet the stringent standards of wafer fabrication and other manufacturing processes, where even the smallest contaminants can cause significant product defects. Veriflo's bulk gas valves are engineered to offer exceptional performance in managing gases like nitrogen, argon, and other specialty gases used in semiconductor production.

Manufactured from materials like VeriClean® 316L stainless steel, Veriflo valves feature low particle generation, leak-tight seals, and high cycle life, making them ideal for maintaining the purity and integrity of semiconductor manufacturing environments. These valves play a critical role in ensuring that the gases used in the process remain uncontaminated, contributing to the overall quality and efficiency of semiconductor production.

Applications of Bulk Gas Valves in Semiconductor Manufacturing

In semiconductor manufacturing, maintaining ultra-high purity (UHP) gas systems is essential for the production of flawless chips and electronic components. Parker Veriflo's bulk gas valves are integral to ensuring this purity, helping control and regulate gas flow in critical semiconductor applications.

Gas Distribution Systems:

Bulk gas valves are used throughout the gas distribution networks in semiconductor fabs to regulate the delivery of gases like nitrogen, hydrogen, and argon. These valves ensure that gases reach each part of the production process without contamination or leakage, which is vital for maintaining the purity required in cleanrooms.

Process Tools:

During wafer fabrication, bulk gas valves control the flow of process gases into various tools like chemical vapor deposition (CVD) and etching equipment. These valves ensure that gases are delivered in precise quantities to achieve the desired chemical reactions without introducing impurities that could compromise the wafer's integrity.

Purge Systems:

Veriflo's bulk gas valves are often used in purge systems to clean pipelines and process tools, ensuring that no residual gases or contaminants remain between production runs. This helps maintain the high standards of cleanliness necessary for semiconductor production, minimizing the risk of contamination.

Gas Isolation:

These valves provide critical gas isolation in emergency situations or during maintenance, preventing cross-contamination and ensuring the safety of the equipment and personnel in the semiconductor fab. Their ability to offer fast, reliable shut-off minimizes downtime and helps maintain continuous production.

Tailored Bulk Gas Valve Solutions

With its deep expertise in gas control solutions, Parker Veriflo has built a reputation for delivering high-performance bulk gas valves specifically tailored to meet the demanding requirements of the semiconductor industry. The precision, reliability, and ultra-clean construction of these valves help ensure that semiconductor manufacturers can maintain the purity and control they need to produce high-quality wafers.

Whether you’re designing a new gas distribution system or upgrading existing infrastructure, Parker Hannifin's Veriflo Division provides solutions that keep your operations running smoothly.