UHP Check Valves
Parker Veriflo’s F9 Series UHP (Ultra-High Purity) Check Valves are specifically engineered for semiconductor manufacturing applications, where ultra-clean environments and contamination control are critical to maintaining process integrity. These valves prevent backflow in sensitive semiconductor systems, ensuring that the purity of gases and chemicals used during wafer fabrication and other semiconductor processes remains uncompromised. With a fully welded stainless steel body and a patented asymmetric spring design, the F9 Series ensures quiet, reliable performance, making it the ideal choice for maintaining the high purity standards required in cleanroom environments.
The F9 Series offers several important benefits. Each valve is assembled in a Class 100 cleanroom, and electropolished surfaces (7 Ra) are available to meet the stringent cleanliness requirements of semiconductor processes. The compact, space-saving design allows for efficient integration into semiconductor manufacturing equipment where space is often limited. Additionally, the innovative asymmetric spring design ensures silent operation, reducing noise in sensitive environments. With versatile seal options, including Fluorocarbon Elastomer (FKM) and Perfluoroelastomer (FFKM), the F9 Series ensures compatibility with a wide range of SEMI-compliant gases used in semiconductor processes.
Applications of UHP Check Valves in Semiconductor Manufacturing
UHP Check Valves play an essential role in semiconductor manufacturing, where preventing contamination is vital to maintaining product quality and production efficiency. Parker Veriflo’s F9 Series UHP Check Valves are designed to meet the exacting standards of the semiconductor industry, offering precise control and reliable performance in a variety of applications across the manufacturing process.
Wafer Fabrication:
During the wafer fabrication process, it is crucial to maintain the purity of gases such as nitrogen, oxygen, and specialty gases used in deposition, etching, and cleaning. The F9 Series UHP Check Valves ensure that there is no backflow of gases into the system, which could introduce contaminants and compromise the quality of the wafers being produced.
Chemical Vapor Deposition (CVD):
In CVD processes, the control of gases and chemicals is vital for the deposition of thin films onto semiconductor wafers. UHP Check Valves prevent contamination and ensure that the gas delivery system remains ultra-clean, protecting the integrity of the deposited materials.
Photolithography:
The precision required in photolithography demands absolute control over the flow of ultra-pure gases. UHP Check Valves ensure that backflow does not occur, safeguarding the delicate photomasks and resists from exposure to contaminants, which could otherwise lead to defects in the semiconductor chips.
Plasma Etching:
Plasma etching is a critical process where materials are etched away from the wafer using reactive gases. The F9 Series ensures that these gases flow in the correct direction without backflow, preventing contamination of the reactive gas supply, and ensuring the precision and accuracy of the etching process.
Ultra-Pure Water Systems in Cleanrooms:
Cleanrooms in semiconductor manufacturing require an uninterrupted supply of ultra-pure water for rinsing and cleaning wafers. Parker Veriflo’s UHP Check Valves ensure that water systems remain free from contamination, preventing backflow into the system and preserving the purity of the water used during critical stages of semiconductor fabrication.
Tailored UHP Check Valve Solutions
Parker Hannifin's Veriflo division understands that semiconductor manufacturing demands high precision and contamination-free environments. The F9 Series UHP Check Valves offer tailored solutions to meet the stringent requirements of semiconductor applications. With various configuration options, including different connection types and seal materials, these valves are designed to integrate seamlessly into your manufacturing process. Whether you need valves with electropolished surfaces or specific seal materials to match the gases used in your production, Parker Veriflo’s experts can help you find the perfect solution.
Contact us today to learn how Parker Veriflo’s UHP Check Valves can enhance the performance and reliability of your semiconductor manufacturing systems.